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An electron cyclotron resonance plasma source

✍ Scribed by G. Lorenz; P. Baumann; G. Castrischer; I. Kessler; K.-H. Kretschmer; B. Dumbacher

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 651 KB
Volume: 139
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(91)90633-x

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