The Preparation, Characterization and Tribological Properties of TA-C:H Deposited Using an Electron Cyclotron Wave Resonance Plasma Beam Source

✍ Scribed by Morrison, N. A. ;Muhl, S. ;Rodil, S. E. ;Ferrari, A. C. ;Nesládek, M. ;Milne, W. I. ;Robertson, J.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 237 KB
• Volume: 172
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199903)172:1<79::aid-pssa79>3.0.co;2-c