✦ LIBER ✦
Diamond thin film growth on silicon at temperatures between 500 and 600 °C using an electron cyclotron resonance microwave plasma source
✍ Scribed by C.R. Eddy Jr.; B.D. Sartwell; D.L. Youchison
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 969 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0257-8972
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