𝔖 Bobbio Scriptorium

✦ LIBER ✦

7241. Potential applications of an electron cyclotron resonance multicusp plasma source: C C Tsai et al,J Vac Sci Technol, A8, 1990, 2900–2903

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 148 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91048-s

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