7239. Behavior of Ar plasmas formed in a mirror field electron cyclotron resonance microwave ion source: S M Gobatkin et al,J Vac Sci Technol, A8, 1990, 2893–2899

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 148 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91046-q