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Thermalization of sputtered aluminium atoms in an electron cyclotron resonance plasma source

✍ Scribed by Poluektov, N P; Kharchenko, V N; Kamyschov, I A

Book ID: 121443999
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 334 KB
Volume: 12
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/12/3/321

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