Extreme-ultraviolet source based on the electron-cyclotron-resonance discharge

✍ Scribed by A. V. Vodopyanov; S. V. Golubev; D. A. Mansfeld; A. G. Nikolaev; K. P. Savkin; N. N. Salashchenko; N. I. Chkhalo; G. Yu. Yushkov

• Book ID: 110168854
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2008
• Tongue: English
• Weight: 169 KB
• Volume: 88
• Category: Article
• ISSN: 0021-3640
• DOI: 10.1134/s0021364008140051