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Electron beam lithography of 100 nm T-gates for GaAs MESFETs

✍ Scribed by B. Wolfstädter; A. Colquhoun; K. Wegener

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 344 KB
Volume: 11
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(90)90085-8

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