✦ LIBER ✦
E-beam process control for the fabrication of T-shaped gates for GaAs MESFETs with dimensions down to 80 nm
✍ Scribed by L. Luciani; M. Gentili; E. Di Fabrizio; B. Gabbrielli
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 284 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0167-9317
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