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Electron beam lithographic fabrication of ultra-submicron gate GaAs MESFETs

✍ Scribed by G. Bernstein; D.K. Ferry

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 402 KB
Volume: 2
Category: Article
ISSN: 0749-6036
DOI: 10.1016/0749-6036(86)90079-0

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