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Electron beam induced deposited etch masks

✍ Scribed by C.Th.H. Heerkens; M.J. Kamerbeek; W.F. van Dorp; C.W. Hagen; J. Hoekstra

Book ID: 104052146
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 519 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.11.079

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