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Electron beam exposure of diazoquinone based resists

✍ Scribed by Wolfgang A. Kräuter; Humbert M. Noll

Book ID: 103598065
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 343 KB
Volume: 9
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(89)90124-x

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