✦ LIBER ✦
Response of diazoquinone resists to optical and electron-beam exposure : Michael Kaplan and Dietrich Meyerhofer. RCA Rev.40, 166 (June 1979)
- Book ID
- 103276803
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 122 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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