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Exposure mechanism of fullerene derivative electron beam resists

✍ Scribed by A.P.G Robinson; R.E Palmer; T Tada; T Kanayama; E.J Shelley; D Philp; J.A Preece


Book ID
108313028
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
424 KB
Volume
312
Category
Article
ISSN
0009-2614

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