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Electron beam exposure of diazoquinone based resists

✍ Scribed by Wolfgang A. Kraeuter; Humbert M. Noll

Book ID: 103270470
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 232 KB
Volume: 21
Category: Article
ISSN: 0026-2692
DOI: 10.1016/0026-2692(90)90075-e

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