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Electron Beam Direct Writing technology for LSI prototyping business

✍ Scribed by Yasuhide Machida; Takashi Maruyama; Yoshinori Kojima; Shinji Sugatani; Haruo Tsuchikawa; Kozo Ogino; Hiromi Hoshino

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 370 KB
Volume: 87
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.11.037

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