✦ LIBER ✦
Application of Monte Carlo modelling to linewidth control for electron beam direct write over device topography
✍ Scribed by T.A. Fretwell; P.L. Jones
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 418 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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