✦ LIBER ✦
Electron beam direct writing technology: system and process: Norio Saitou et al, Solid State Technol, 30, 1987, 65–70
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 146 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.