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Electron backscatter diffraction and electron channeling contrast imaging of tilt and dislocations in nitride thin films

โœ Scribed by Trager-Cowan, C.; Sweeney, F.; Trimby, P. W.; Day, A. P.; Gholinia, A.; Schmidt, N.-H.; Parbrook, P. J.; Wilkinson, A. J.; Watson, I. M.


Book ID
118019497
Publisher
The American Physical Society
Year
2007
Tongue
English
Weight
926 KB
Volume
75
Category
Article
ISSN
1098-0121

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## Abstract The imaging and characterization of dislocations is commonly carried out by thin foil transmission electron microscopy (TEM) using diffraction contrast imaging. However, the thin foil approach is limited by difficult sample preparation, thin foil artifacts, relatively small viewable are