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Electroless Co(Mo,P) films for Cu interconnect application

✍ Scribed by Y Shacham-Diamand; A Zylberman; N Petrov; Y Sverdlov

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 197 KB
Volume: 64
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00804-3

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