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Electrochemical C–V Profiling of Silicon Structure

✍ Scribed by Kinder, R.


Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
151 KB
Volume
164
Category
Article
ISSN
0031-8965

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Electrolyte for electrochemical C-V prof
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A new electrolyte (UNIEL) based on HF, NH3F2, C9H14C1N , CH3COOH and o-H3PO 4 has been developed for accurate EC-V net majority carrier concentration profiling of InP-and GaAs-based III-V semiconductors. The new electrolyte was tested with good results on heterostructures containing p-and n-type InP