✦ LIBER ✦

Electrolyte for electrochemical C-V profiling of InP- and GaAs-based structures

✍ Scribed by Maria Faur; Mircea Faur; D.J. Flood; M. Goradia

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 250 KB
Volume: 28
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(94)90083-3

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✦ Synopsis

A new electrolyte (UNIEL) based on HF, NH3F2, C9H14C1N , CH3COOH and o-H3PO 4 has been developed for accurate EC-V net majority carrier concentration profiling of InP-and GaAs-based III-V semiconductors. The new electrolyte was tested with good results on heterostructures containing p-and n-type InP, GaAs, lnGaAs and InGaAsP layers.

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