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Electrical properties of Si—Al2O3 structures grown by ML-ALE

✍ Scribed by V.E. Drozd; A.P. Baraban; I.O. Nikiforova

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
277 KB
Volume
82-83
Category
Article
ISSN
0169-4332

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