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Electrical properties of high-quality ultrathin nitride/oxide stack dielectrics

✍ Scribed by Ying Shi; Xiewen Wang; Tso-Ping Ma

Book ID: 114537558
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 174 KB
Volume: 46
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.740903

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