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Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition

✍ Scribed by T. Fanaei; N. Camiré; C. Aktik; S. Gujrathi; M. Lessard; Y. Awad; E. Oulachgar; M. Scarlete

Book ID
108289800
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
780 KB
Volume
516
Category
Article
ISSN
0040-6090

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Preparation of hydrogenated amorphous si
Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition
✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic