✦ LIBER ✦

Chemical Vapor Deposition of Silicon Carbide Epitaxial Films and Their Defect Characterization

✍ Scribed by Govindhan Dhanaraj; Yi Chen; Hui Chen; Dang Cai; Hui Zhang; Michael Dudley

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preferred Orientation of Chemical Vapor

✍ Y. Kajikawa; S. Noda; H. Komiyama 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 260 KB 👁 1 views

Low pressure chemical vapor deposition o

✍ Hsin-Tien Chiu; Jen-Shiou Hsu 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 688 KB

Nonstoichiometry and nanocrystallization

✍ A. Josiek 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 444 KB

Microstructure and composition of silico

✍ D. Dietrich; H. Podlesak; G. Marx; B. Wielage 📂 Article 📅 1998 🏛 Springer 🌐 English ⚖ 336 KB

Properties of hydrogenated amorphous sil

✍ Dan Kuhman; Steve Grammatica; Frank Jansen 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 416 KB

Growth and characterization of silicon-n

✍ I.K. Han; Y.J. Lee; J.W. Jo; J.I. Lee; K.N. Kang 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 310 KB