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Electrical Characterization of Aluminum Nitride Films on Silicon Grown by Chemical Vapor Deposition

✍ Scribed by Khan, A. H.; Meese, J. M.; Stacy, T.; Charlson, E. M.; Charlson, E. J.; Zhao, G.; Popovici, G.; Prelas, M. A.

No coin nor oath required. For personal study only.

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