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Silicon nitride films deposited by Hg-photosensitization chemical vapor deposition

✍ Scribed by M. Lemiti; S. Audisio; J.C. Dupuy; B. Balland

Book ID: 117147277
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 425 KB
Volume: 144
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80409-0

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