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Electrical Characteristics of Ultrathin Atomic Layer Deposited and Stacked Dielectrics on -Treated InP

✍ Scribed by Ming-Kwei Lee; Chih-Feng Yen; Sheng-Hsiung Yang

Book ID: 114620685
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 280 KB
Volume: 58
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2011.2164544

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