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Electrical characteristics of gold nanoparticle-embedded MIS capacitors with parylene gate dielectric

✍ Scribed by Byoungjun Park; Ki-Ju Im; Kyoungah Cho; Sangsig Kim


Book ID
104075932
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
454 KB
Volume
9
Category
Article
ISSN
1566-1199

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High j HfO x N y film was deposited on amorphous InGaZnO (a-IGZO) by radio-frequency reactive sputtering using an HfO 2 target in nitrogen plus argon ambience, the electrical characteristics and reliability of a-IGZO metal-insulator-semiconductor (MIS) capacitors were investigated. Experimental resu