Electrical and structural properties of In-doped ZnO films deposited by RF superimposed DC magnetron sputtering system
β Scribed by Ji Bong Park; Se Hun Park; Pung Keun Song
- Book ID
- 108191704
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 423 KB
- Volume
- 71
- Category
- Article
- ISSN
- 0022-3697
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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radioβfrequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), Xβray diffraction, and Xβray photoelec
The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc