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Elastic stiffness and thermal expansion coefficients of various refractory silicides and silicon nitride films

โœ Scribed by T.F. Retajczyk Jr.; A.K. Sinha


Book ID
107862819
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
369 KB
Volume
70
Category
Article
ISSN
0040-6090

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