✦ LIBER ✦
Internal stress, thermal expansion coefficient and bi-elastic modulus of photochemically vapour deposited hydrogenated amorphous silicon films
✍ Scribed by Shuwen Guo; Weiyuan Wang
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 311 KB
- Volume
- 219
- Category
- Article
- ISSN
- 0040-6090
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