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Linear thermal expansion coefficients of amorphous and microcrystalline silicon films

โœ Scribed by K. Takimoto; A. Fukuta; Y. Yamamoto; N. Yoshida; T. Itoh; S. Nonomura


Book ID
117145693
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
96 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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