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Thermal expansion and elastic properties of plasma-deposited amorphous silicon and silicon oxide films

โœ Scribed by Jansen, F.; Machonkin, M. A.; Palmieri, N.; Kuhman, D.


Book ID
120051557
Publisher
American Institute of Physics
Year
1987
Tongue
English
Weight
584 KB
Volume
50
Category
Article
ISSN
0003-6951

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