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Elastic relaxation of dry-etched Si/SiGe quantum dots

✍ Scribed by Darhuber, A. A.; Grill, T.; Stangl, J.; Bauer, G.; Lockwood, D. J.; Noël, J.-P.; Wang, P. D.; Sotomayor Torres, C. M.

Book ID: 127050508
Publisher: The American Physical Society
Year: 1998
Tongue: English
Weight: 499 KB
Volume: 58
Category: Article
ISSN: 1098-0121
DOI: 10.1103/physrevb.58.4825

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