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Effect of dry etching and subsequent annealing of Si/SiGe/Si heterostructure

✍ Scribed by Swain, P. K.; Misra, D.; Thompson, P. E.

Book ID: 121307121
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 348 KB
Volume: 79
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.361748

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