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Effects of the inclination direction of vicinal m-plane sapphire substrates on the crystal quality of m-plane GaN film

✍ Scribed by Youngji Cho; Sungkuk Choi; Gyung-Suk Kil; Hyun-Jae Lee; Takafumi Yao; Jun-Mo Yang; Jungho Yoo; Jangwoo Kwon; Jiho Chang


Book ID
104022435
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
853 KB
Volume
325
Category
Article
ISSN
0022-0248

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✦ Synopsis


Herein is a discussion of how the structural and optical properties of m-plane GaN (m-GaN) films are affected by the inclination direction of vicinal m-plane sapphire substrate. The m-GaN films were grown on three different types of substrates inclined toward the a-axis direction, the c-axis direction, and with no inclination. We found that m-GaN film grown on an m-plane sapphire inclined in the a-axis direction showed the highest quality with a smooth surface and a low stacking fault density. A model is proposed that shows how the surface step of a substrate can reduce the generation of stacking fault in m-GaN film.


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