The effect of a slight mis-orientation angle of c-plane sapphire substrate on surface and crystal quality of MOCVD grown GaN thin films

✍ Scribed by Seong-Woo Kim; Hideo Aida; Toshimasa Suzuki

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 542 KB
• Volume: 1
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.200405028