Preparation and characterization of indi
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C. Liu; T. Mihara; T. Matsutani; T. Asanuma; M. Kiuchi
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Article
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2003
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Elsevier Science
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English
β 195 KB
Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic