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Effects of SiO2and TiO2on resistance stabilities of flexible indium-tin-oxide films prepared by ion assisted deposition

✍ Scribed by Yuqiong Li; Zhinong Yu; Wuyu Wang; Yuejiang Fan; Zhao Ding; Wei Xue


Book ID
107668946
Publisher
Nonferrous Metals Society of China
Year
2009
Tongue
English
Weight
619 KB
Volume
28
Category
Article
ISSN
1001-0521

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Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic