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Effect of ion-beam assisted deposition on the film stresses of TiO2and SiO2and stress control

✍ Scribed by Yu-Qiong Li, Hua-Qing Wang, Wu-Yu Wang, Zhi-Nong Yu, He-Shan Liu, Gang Jin

Book ID: 118794248
Publisher: The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences
Year: 2012
Tongue: English
Weight: 595 KB
Volume: 28
Category: Article
ISSN: 0567-7718
DOI: 10.1007/s10409-012-0146-z

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