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Stress relaxation and optical characterization of TiO2 and SiO2 films grown by dual ion beam deposition

✍ Scribed by C. Bundesmann; I.-M. Eichentopf; S. Mändl; H. Neumann


Book ID
108290126
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
827 KB
Volume
516
Category
Article
ISSN
0040-6090

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In this work the optical and the gas sensing properties of thick TiO 2 waveguide films, produced by pulsed laser deposition, were investigated by m-line spectroscopy. The films were deposited on (0 0 1) SiO 2 substrates at temperature of 100 8C. The thickness of the films was measured to be in the r