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Effect of Ion Beam Bombarding on Stress in TiO2 Thin Films

✍ Scribed by Tao Chen; Chongtai Luo; Duoshu Wang; Yuqing Xiong

Book ID: 113846537
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 318 KB
Volume: 18
Category: Article
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2011.06.071

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