✦ LIBER ✦

Structural, electrical and optical properties of indium tin oxide films prepared by low-energy oxygen-ion-beam assisted deposition

✍ Scribed by C. Liu; T. Matsutani; T. Asanuma; M. Kiuchi

Book ID: 114167092
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 124 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00760-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preparation and characterization of indi

Preparation and characterization of indium tin oxide films formed by oxygen ion beam assisted deposition

✍ C. Liu; T. Mihara; T. Matsutani; T. Asanuma; M. Kiuchi 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 195 KB

Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic

The effect of the ion beam energy on the

The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

✍ Li-Jian Meng; Jinsong Gao; M.P. dos Santos; Xiaoyi Wang; Tongtong Wang 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 572 KB

Indium tin oxide thin films prepared by

Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents

✍ Meng, Lijian ;Gao, Jinsong ;Teixeira, V. ;dos Santos, M. P. 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 664 KB

## Abstract Indium tin oxide (ITO) films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique (IBAD) at different ion beam currents (80–120 mA). The effect of the ion beam current on films properties has been studied. The films prepared at low ion

Low temperature deposition of indium tin

Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation

✍ Füchsel, Kevin ;Schulz, Ulrike ;Kaiser, Norbert ;Tünnermann, Andreas 📂 Article 📅 2008 🏛 The Optical Society 🌐 English ⚖ 790 KB

Structural, optical and electrical prope

Structural, optical and electrical properties of indium tin oxide thin films prepared by spray pyrolysis

✍ E. Benamar; M. Rami; C. Messaoudi; D. Sayah; A. Ennaoui 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 568 KB

Optical and electrical properties of Y2O

Optical and electrical properties of Y2O3 thin films prepared by ion beam assisted deposition

✍ Jian Leng; Zhinong Yu; Yuqiong Li; Dongpu Zhang; Xiaoyi Liao; Wei Xue 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 459 KB

Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had le