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Comparison of surface morphologies of SiO2 films prepared by ion-beam induced chemical vapor deposition and ion-beam assisted deposition

✍ Scribed by T. Matsutani; T. Asanuma; C. Liu; M. Kiuchi; T. Takeuchi

Book ID: 114167091
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 201 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00759-6

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