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Preparation of aluminum oxide films by ion beam assisted deposition

✍ Scribed by I Shimizu; Y Setsuhara; S Miyake; M Kumagai; K Ogata; M Kohata; K Yamaguchi

Book ID: 108422774
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 172 KB
Volume: 131
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(00)00823-9

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