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Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition

✍ Scribed by Jaebum Kim; Kuntal Chakrabarti; Jinho Lee; Ki-Young Oh; Chongmu Lee

Book ID: 114193328
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 166 KB
Volume: 78
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(02)00375-9

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