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Preparation and characterization of thin films of MgO, Al2O3and MgAl2O4by atomic layer deposition

✍ Scribed by Ron Huang; Adrian H. Kitai

Book ID: 112819599
Publisher: Springer US
Year: 1993
Tongue: English
Weight: 600 KB
Volume: 22
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02665029

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