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Effects of ion beam mixing on the depth profiles of thin metal layer in TiO2

✍ Scribed by S Miyagawa; K Baba; S Nakao; M Ikeyama; K Saitoh; Y Miyagawa

Book ID
114170179
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
282 KB
Volume
141
Category
Article
ISSN
0168-583X

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✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf