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Effects of halogenated organic solvents on laser-induced backside wet etching of fused silica

✍ Scribed by R. Böhme; K. Zimmer

Publisher
Springer
Year
2006
Tongue
English
Weight
280 KB
Volume
83
Category
Article
ISSN
1432-0630

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✍ Ying-Tsung Lu; Yung-Hsin Chen; Sien Chi 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 176 KB

## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on